Narrated Aisha, Ummul Mu'minin:

Shariq al-Hawzani and I came to Aisha (Allah be pleased with her) and asked her: By which (prayer) the Messenger of Allah ﷺ began when he woke up at night? She replied: You asked me about a thing which no one asked me before. When he woke up at night, he uttered: "Allah is Most Great" ten times, and uttered "Praise be to Allah" ten times, and said "Glory be to Allah and I begin with His praise" ten times, and said: "Glory be to the King, the Most Holy" ten times, and asked Allah's pardon ten times, and said: "There is no god but Allah" ten times, and then said: "O Allah! I seek refuge in Thee from the strait of the Day of resurrection," ten times. He then began the prayer.

حَدَّثَنَا كَثِيرُ بْنُ عُبَيْدٍ، حَدَّثَنَا بَقِيَّةُ بْنُ الْوَلِيدِ، عَنْ عُمَرَ بْنِ جُعْثُمٍ، قَالَ حَدَّثَنِي الأَزْهَرُ بْنُ عَبْدِ اللَّهِ الْحَرَازِيُّ، قَالَ حَدَّثَنِي شَرِيقٌ الْهَوْزَنِيُّ، قَالَ دَخَلْتُ عَلَى عَائِشَةَ رضى الله عنها فَسَأَلْتُهَا بِمَ كَانَ رَسُولُ اللَّهِ ﷺ يَفْتَتِحُ إِذَا هَبَّ مِنَ اللَّيْلِ فَقَالَتْ لَقَدْ سَأَلْتَنِي عَنْ شَىْءٍ مَا سَأَلَنِي عَنْهُ أَحَدٌ قَبْلَكَ كَانَ إِذَا هَبَّ مِنَ اللَّيْلِ كَبَّرَ عَشْرًا وَحَمِدَ عَشْرًا وَقَالَ " سُبْحَانَ اللَّهِ وَبِحَمْدِهِ " . عَشْرًا وَقَالَ " سُبْحَانَ الْمَلِكِ الْقُدُّوسِ " . عَشْرًا وَاسْتَغْفَرَ عَشْرًا وَهَلَّلَ عَشْرًا ثُمَّ قَالَ " اللَّهُمَّ إِنِّي أَعُوذُ بِكَ مِنْ ضِيقِ الدُّنْيَا وَضِيقِ يَوْمِ الْقِيَامَةِ " . عَشْرًا ثُمَّ يَفْتَتِحُ الصَّلاَةَ .